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Cu Etching |
A-PROCESS-W |
¾à¾ËÄ«¸® TypeÀÇ Cu Sputter EtchingÁ¦ Etching¼Óµµ: 5000¡Ê/10sec(Dipping) |
E-PROCESS-WL |
¾à¾ËÄ«¸® TypeÀÇ Cu Sputter EtchingÁ¦ Etching¼Óµµ: 6000¡Ê/min(Dipping) |
Melstrip CU-3931 |
»ê¼º TypeÀÇ Cu Sputter¸· EtchingÁ¦ Etching¼Óµµ: 7500¡Ê/min(Dipping) |
Ti Etching |
Melstrip TI-3991 |
¾ËÄ«¸® TypeÀÇ Ti Sputter¸· EtchingÁ¦ Etching¼Óµµ: 300 ~ 850¡Ê/min(Dipping) |